@inproceedings{2a813fcad0304fa68baac75083fe8f9a,
title = "Extremely enhanced diffusion of nitrogen in 4H-SiC observed in liquid-nitrogen immersion irradiation of excimer laser",
keywords = "4H-SiC, Carbon vacancy, Doping, Excimer laser, Laser doping, Nitrogen diffusion, Nitrogen donor, SiC, Wet chemical doping",
author = "A. Ikeda and D. Marui and H. Ikenoue and T. Asano",
year = "2015",
doi = "10.4028/www.scientific.net/MSF.821-823.448",
language = "English",
isbn = "9783038354789",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "448--451",
editor = "Didier Chaussende and Gabriel Ferro",
booktitle = "Silicon Carbide and Related Materials 2014",
note = "European Conference on Silicon Carbide and Related Materials, ECSCRM 2014 ; Conference date: 21-09-2014 Through 25-09-2014",
}