Extremely Enhanced Diffusion of Nitrogen in 4H-SiC Observed in Liquid-Nitrogen Immersion Irradiation of Excimer Laser

Akihiro Ikeda, Daichi Marui, Hiroshi Ikenoue, Tanemasa Asano

Research output: Contribution to journal › Article › peer-review

Cite this

@article{57b605882d5849198a1fe3d92cc5d83e,

title = "Extremely Enhanced Diffusion of Nitrogen in 4H-SiC Observed in Liquid-Nitrogen Immersion Irradiation of Excimer Laser",

author = "Akihiro Ikeda and Daichi Marui and Hiroshi Ikenoue and Tanemasa Asano",

year = "2015",

month = may,

language = "English",

volume = "821-823",

pages = "448--451",

journal = "Materials Science Forum",

issn = "0255-5476",

publisher = "Trans Tech Publications",

}