Exploration of new sensing electrode materials for FET-type NOx sensors with fast response

H. Inoue; M. Yuasa; T. Kida; K. Shimanoe; N. Yamazoe

doi:10.1166/sl.2008.528

Exploration of new sensing electrode materials for FET-type NOx sensors with fast response

H. Inoue, M. Yuasa, T. Kida, K. Shimanoe, N. Yamazoe

Functional Materials Science

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A FET type NO₂ sensor fitted with NaNO₂-RU/WO₃ as a new auxiliary (sensing) layer was fabricated and tested for its NO₂ sensing properties. The developed device responded to dilute NO₂ of ppb concentrations (20-300 ppb) at 130 and 170 °C. The sensor signal (V_Gs; gate-source voltage) is linearly proportional to the logarithm of NO₂ concentration, exhibiting the Nernstian response. It was found that the response speed was improved at lower operating temperature by adding Ru to the NaNO₂-WO₃ auxiliary layer. It was suggested that Ru nanoparticles deposited in the auxiliary layer with a porous morphology improved the rate of adsorption and electrochemical reaction of NO₂ occurring at the interface between the Au gate electrode and auxiliary layer.

Original language	English
Pages (from-to)	912-915
Number of pages	4
Journal	Sensor Letters
Volume	6
Issue number	6
DOIs	https://doi.org/10.1166/sl.2008.528
Publication status	Published - Dec 2008

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1166/sl.2008.528

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title = "Exploration of new sensing electrode materials for FET-type NOx sensors with fast response",

abstract = "A FET type NO2 sensor fitted with NaNO2-RU/WO3 as a new auxiliary (sensing) layer was fabricated and tested for its NO2 sensing properties. The developed device responded to dilute NO2 of ppb concentrations (20-300 ppb) at 130 and 170 °C. The sensor signal (VGs; gate-source voltage) is linearly proportional to the logarithm of NO2 concentration, exhibiting the Nernstian response. It was found that the response speed was improved at lower operating temperature by adding Ru to the NaNO2-WO3 auxiliary layer. It was suggested that Ru nanoparticles deposited in the auxiliary layer with a porous morphology improved the rate of adsorption and electrochemical reaction of NO2 occurring at the interface between the Au gate electrode and auxiliary layer.",

author = "H. Inoue and M. Yuasa and T. Kida and K. Shimanoe and N. Yamazoe",

year = "2008",

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doi = "10.1166/sl.2008.528",

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T1 - Exploration of new sensing electrode materials for FET-type NOx sensors with fast response

AU - Inoue, H.

AU - Yuasa, M.

AU - Kida, T.

AU - Shimanoe, K.

AU - Yamazoe, N.

PY - 2008/12

Y1 - 2008/12

N2 - A FET type NO2 sensor fitted with NaNO2-RU/WO3 as a new auxiliary (sensing) layer was fabricated and tested for its NO2 sensing properties. The developed device responded to dilute NO2 of ppb concentrations (20-300 ppb) at 130 and 170 °C. The sensor signal (VGs; gate-source voltage) is linearly proportional to the logarithm of NO2 concentration, exhibiting the Nernstian response. It was found that the response speed was improved at lower operating temperature by adding Ru to the NaNO2-WO3 auxiliary layer. It was suggested that Ru nanoparticles deposited in the auxiliary layer with a porous morphology improved the rate of adsorption and electrochemical reaction of NO2 occurring at the interface between the Au gate electrode and auxiliary layer.

AB - A FET type NO2 sensor fitted with NaNO2-RU/WO3 as a new auxiliary (sensing) layer was fabricated and tested for its NO2 sensing properties. The developed device responded to dilute NO2 of ppb concentrations (20-300 ppb) at 130 and 170 °C. The sensor signal (VGs; gate-source voltage) is linearly proportional to the logarithm of NO2 concentration, exhibiting the Nernstian response. It was found that the response speed was improved at lower operating temperature by adding Ru to the NaNO2-WO3 auxiliary layer. It was suggested that Ru nanoparticles deposited in the auxiliary layer with a porous morphology improved the rate of adsorption and electrochemical reaction of NO2 occurring at the interface between the Au gate electrode and auxiliary layer.

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Exploration of new sensing electrode materials for FET-type NOx sensors with fast response

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