Evaluation of effective length of the enhanced oxidation of active oxygen produced using SrTixMg1-xO3-δ catalyst for low-temperature oxidation

Hsiang Fang Sun; Akihiro Ikeda; Tanemasa Asano

doi:10.7567/JJAP.57.04FB09

Evaluation of effective length of the enhanced oxidation of active oxygen produced using SrTi_xMg_1-xO_3-δ catalyst for low-temperature oxidation

Hsiang Fang Sun, Akihiro Ikeda, Tanemasa Asano

Integrated Electronic Systems

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Abstract

Thermal oxidation using the SrTi_xMg_1-xO_3-δ catalyst to produce oxygen atoms in a furnace is investigated to determine the effective length of the enhanced oxidation of atomic oxygen. An experimental study was carried out by placing the catalyst material at the side of a Si wafer in a furnace and measuring the thickness of silicon dioxide. The activation energy of linear rate constant in the Deal-Grove model was found to decrease with decreasing distance from the catalyst. The thickness distribution was found to be fitted by the Gaussian distribution, which gave us the effective length of atomic oxygen up to 24mm.

Original language	English
Article number	04FB09
Journal	Japanese journal of applied physics
Volume	57
Issue number	4
DOIs	https://doi.org/10.7567/JJAP.57.04FB09
Publication status	Published - Apr 2018

All Science Journal Classification (ASJC) codes

General Engineering
General Physics and Astronomy

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title = "Evaluation of effective length of the enhanced oxidation of active oxygen produced using SrTixMg1-xO3-δ catalyst for low-temperature oxidation",

abstract = "Thermal oxidation using the SrTixMg1-xO3-δ catalyst to produce oxygen atoms in a furnace is investigated to determine the effective length of the enhanced oxidation of atomic oxygen. An experimental study was carried out by placing the catalyst material at the side of a Si wafer in a furnace and measuring the thickness of silicon dioxide. The activation energy of linear rate constant in the Deal-Grove model was found to decrease with decreasing distance from the catalyst. The thickness distribution was found to be fitted by the Gaussian distribution, which gave us the effective length of atomic oxygen up to 24mm.",

author = "Sun, {Hsiang Fang} and Akihiro Ikeda and Tanemasa Asano",

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N2 - Thermal oxidation using the SrTixMg1-xO3-δ catalyst to produce oxygen atoms in a furnace is investigated to determine the effective length of the enhanced oxidation of atomic oxygen. An experimental study was carried out by placing the catalyst material at the side of a Si wafer in a furnace and measuring the thickness of silicon dioxide. The activation energy of linear rate constant in the Deal-Grove model was found to decrease with decreasing distance from the catalyst. The thickness distribution was found to be fitted by the Gaussian distribution, which gave us the effective length of atomic oxygen up to 24mm.

AB - Thermal oxidation using the SrTixMg1-xO3-δ catalyst to produce oxygen atoms in a furnace is investigated to determine the effective length of the enhanced oxidation of atomic oxygen. An experimental study was carried out by placing the catalyst material at the side of a Si wafer in a furnace and measuring the thickness of silicon dioxide. The activation energy of linear rate constant in the Deal-Grove model was found to decrease with decreasing distance from the catalyst. The thickness distribution was found to be fitted by the Gaussian distribution, which gave us the effective length of atomic oxygen up to 24mm.

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Evaluation of effective length of the enhanced oxidation of active oxygen produced using SrTi_xMg_1-xO_3-δ catalyst for low-temperature oxidation

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