Evaluation of Damage Induced by Low-Energy Ion Irradiation in Silicon

Akiyoshi Baba, Taizoh Sadoh, Atsushi[et al] Kenjo

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	127-138
Number of pages	12
Journal	Memoirs of the Faculty of Engineering, Kyushu University
Volume	55
Issue number	2
Publication status	Published - Jun 1995

Cite this

@article{b757e35c3414424fa6e9ebc00329dfec,

title = "Evaluation of Damage Induced by Low-Energy Ion Irradiation in Silicon",

author = "Akiyoshi Baba and Taizoh Sadoh and Kenjo, {Atsushi[et al]}",

year = "1995",

month = jun,

language = "English",

volume = "55",

pages = "127--138",

journal = "Memoirs of the Faculty of Engineering, Kyushu University",

issn = "1345-868X",

publisher = "Kyushu University, Faculty of Science",

number = "2",

}

TY - JOUR

T1 - Evaluation of Damage Induced by Low-Energy Ion Irradiation in Silicon

AU - Baba, Akiyoshi

AU - Sadoh, Taizoh

AU - Kenjo, Atsushi[et al]

PY - 1995/6

Y1 - 1995/6

UR - https://ci.nii.ac.jp/naid/110000020153

M3 - Article

SN - 1345-868X

VL - 55

SP - 127

EP - 138

JO - Memoirs of the Faculty of Engineering, Kyushu University

JF - Memoirs of the Faculty of Engineering, Kyushu University

IS - 2

ER -