Erosion behavior of carbon deposition layers formed by hydrogen plasma sputtering

T. Okamura; Kazunari Katayama; K. Imaoka; Y. Uchida; M. Nishikawa; Satoshi Fukada

doi:10.13182/FST07-A1562

Erosion behavior of carbon deposition layers formed by hydrogen plasma sputtering

T. Okamura, Kazunari Katayama, K. Imaoka, Y. Uchida, M. Nishikawa, Satoshi Fukada

Engineering Science for Advanced energy system

Research output: Contribution to journal › Article › peer-review

Abstract

The erosion of carbon deposition layers by oxygen exposure and the desorpstion of hydrogen retained in the layers were investigated experimentally. Carbon deposition layers were formed by a sputtering method using hydrogen RF plasma. The layers were exposed to an argon gas with oxygen of 1013 Pa in the temperature range of 200 - 400°C. The erosion reaction progressed quickly within 10 minutes and then decelerated rapidly. The measurement of the outlet concentration revealed that most of the layer was eroded not as carbon monoxide and carbon dioxide but as soot. Additionally, it was estimated that the soot was released from the carbon deposition layer with a large amount of hydrogen.

Original language	English
Pages (from-to)	645-648
Number of pages	4
Journal	Fusion Science and Technology
Volume	52
Issue number	3
DOIs	https://doi.org/10.13182/FST07-A1562
Publication status	Published - Jan 1 2007

All Science Journal Classification (ASJC) codes

Civil and Structural Engineering
Nuclear and High Energy Physics
Nuclear Energy and Engineering
Materials Science(all)
Mechanical Engineering

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abstract = "The erosion of carbon deposition layers by oxygen exposure and the desorpstion of hydrogen retained in the layers were investigated experimentally. Carbon deposition layers were formed by a sputtering method using hydrogen RF plasma. The layers were exposed to an argon gas with oxygen of 1013 Pa in the temperature range of 200 - 400°C. The erosion reaction progressed quickly within 10 minutes and then decelerated rapidly. The measurement of the outlet concentration revealed that most of the layer was eroded not as carbon monoxide and carbon dioxide but as soot. Additionally, it was estimated that the soot was released from the carbon deposition layer with a large amount of hydrogen.",

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AU - Okamura, T.

AU - Katayama, Kazunari

AU - Imaoka, K.

AU - Uchida, Y.

AU - Nishikawa, M.

AU - Fukada, Satoshi

PY - 2007/1/1

Y1 - 2007/1/1

N2 - The erosion of carbon deposition layers by oxygen exposure and the desorpstion of hydrogen retained in the layers were investigated experimentally. Carbon deposition layers were formed by a sputtering method using hydrogen RF plasma. The layers were exposed to an argon gas with oxygen of 1013 Pa in the temperature range of 200 - 400°C. The erosion reaction progressed quickly within 10 minutes and then decelerated rapidly. The measurement of the outlet concentration revealed that most of the layer was eroded not as carbon monoxide and carbon dioxide but as soot. Additionally, it was estimated that the soot was released from the carbon deposition layer with a large amount of hydrogen.

AB - The erosion of carbon deposition layers by oxygen exposure and the desorpstion of hydrogen retained in the layers were investigated experimentally. Carbon deposition layers were formed by a sputtering method using hydrogen RF plasma. The layers were exposed to an argon gas with oxygen of 1013 Pa in the temperature range of 200 - 400°C. The erosion reaction progressed quickly within 10 minutes and then decelerated rapidly. The measurement of the outlet concentration revealed that most of the layer was eroded not as carbon monoxide and carbon dioxide but as soot. Additionally, it was estimated that the soot was released from the carbon deposition layer with a large amount of hydrogen.

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Erosion behavior of carbon deposition layers formed by hydrogen plasma sputtering

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