@article{0e225ebd683a46878d39abdfa8bfd383,
title = "Epitaxial growth of 3C–SiC on Si(111) and (001) by laser CVD",
abstract = "Epitaxial 3C–SiC films have been deposited on Si(111) and Si(001) substrates via laser CVD with deposition rate of 12.32 and 15.56 μm/h, respectively. The activation energy of 3C–SiC on Si(111) and Si(001) was 80 and 160 kJ/mol, and the root mean square (RMS) roughness (w) as a function of the film thickness (h) follows power laws of w~h0.31 and w~h0.06, respectively. The growth mechanisms of epitaxial 3C–SiC films on Si(111) and Si(001) was investigated based on the structural analysis and roughness evolution.",
author = "Peipei Zhu and Meijun Yang and Qingfang Xu and Qingyun Sun and Rong Tu and Jun Li and Song Zhang and Qizhong Li and Lianmeng Zhang and Takashi Goto and Ji Shi and Haiwen Li and Hitoshi Ohmori and Marina Kosinova and Bikramjit Basu",
note = "Funding Information: National Natural Science Foundation of China, Grant/Award Number: 51372188, 11602251, 51521001; 111 Project, Grant/ Award Number: B13035; International Science & Technology Cooperation Program of China, Grant/Award Number: 2014DFA53090; Natural Science Foundation of Hubei Province, China, Grant/Award Number: 2016CFA006; Fundamental Research Funds for the Central Universities, Grant/Award Number: 2017II43GX, 2017III032, 2017YB004; Science Challenge Project, Grant/Award Number: TZ2016001 Funding Information: This work was supported by National Natural Science Foundation of China, Nos. 51372188, 11602251 and 51521001 and the 111 Project (B13035). This research was also supported by the International Science & Technology Cooperation Program of China (2014DFA53090), and the Natural Science Foundation of Hubei Province, China (2016CFA006), and the Fundamental Research Funds for the Central Universities (WUT: 2017II43GX, 2017III032, 2017YB004), and Science Challenge Project (No. TZ2016001). Publisher Copyright: {\textcopyright} 2018 The American Ceramic Society",
year = "2018",
month = sep,
doi = "10.1111/jace.15557",
language = "English",
volume = "101",
pages = "3850--3856",
journal = "Journal of the American Ceramic Society",
issn = "0002-7820",
publisher = "Wiley-Blackwell",
number = "9",
}