| Original language | English |
|---|---|
| Pages (from-to) | 221-224 |
| Journal | Institute of Physics Conference Series |
| Volume | 142 |
| Publication status | Published - 1996 |
Epitaxial growth of β-SiC by tetramethylsilane supersonic free jets: precursor control effects
Yoshifumi Ikoma, Fumiya Watanabe, Teruaki Motooka
Research output: Contribution to journal › Article › peer-review