TY - JOUR
T1 - Enhancement of the diffusion of oxygen and boron in silicon crystals under irradiation of infrared laser light
AU - Liu, Lijun
AU - Tanahashi, Katsutoshi
AU - Yamada-Kaneta, Hiroshi
AU - Kangawa, Y.
AU - Kakimoto, Koichi
N1 - Funding Information:
This work was partly supported by a Grant-in-Aid for Scientific Research (B) 14350010 and Grant-in-Aid for the creation of innovation through business-academy-public sector cooperation from the Ministry of Education, Science, Sports, and Culture of Japan.
PY - 2006/4
Y1 - 2006/4
N2 - Numerical and experimental analyses revealed the enhancement of diffusion of oxygen and boron by laser irradiation. We studied the effect of laser irradiation on the enhancement of diffusion of boron and oxygen including both isotopes of O16 and O18. The study clarified that the diffusion of the impurities was enhanced by laser irradiation by about 2.5-8 times more than that in the case without laser irradiation in the temperature range from 990 to 1200°C. We confirmed from temperature measurements of the samples that such enhancement was not based on temperature increase caused by laser irradiation but was based on the effect of irradiation of the laser. The effect of frequency of the laser on the diffusion was observed by changing the wavelength of the laser.
AB - Numerical and experimental analyses revealed the enhancement of diffusion of oxygen and boron by laser irradiation. We studied the effect of laser irradiation on the enhancement of diffusion of boron and oxygen including both isotopes of O16 and O18. The study clarified that the diffusion of the impurities was enhanced by laser irradiation by about 2.5-8 times more than that in the case without laser irradiation in the temperature range from 990 to 1200°C. We confirmed from temperature measurements of the samples that such enhancement was not based on temperature increase caused by laser irradiation but was based on the effect of irradiation of the laser. The effect of frequency of the laser on the diffusion was observed by changing the wavelength of the laser.
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U2 - 10.1063/1.2189022
DO - 10.1063/1.2189022
M3 - Article
AN - SCOPUS:33645914122
SN - 0021-8979
VL - 99
JO - Journal of Applied Physics
JF - Journal of Applied Physics
IS - 7
M1 - 073103
ER -