Energy Level and Solid Solubility of Cobalt in Silicon by In-Depth Profile Measurement

Hiroshi Nakashima, Hajime Kitagawa, Kimio Hashimoto, Hajime Tomokage

    Research output: Contribution to journalArticlepeer-review

    9 Citations (Scopus)
    Original languageEnglish
    Number of pages1
    JournalJapanese journal of applied physics
    Issue number6R
    Publication statusPublished - Jun 1984

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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