Energy Level and Solid Solubility of Cobalt in Silicon by In-Depth Profile Measurement

Hiroshi Nakashima, Hajime Kitagawa, Kimio Hashimoto, Hajime Tomokage

Research output: Contribution to journal › Article › peer-review

Original language	English
Number of pages	1
Journal	Japanese journal of applied physics
Volume	23
Issue number	6R
DOIs	https://doi.org/10.1143/JJAP.23.776
Publication status	Published - Jun 1984

All Science Journal Classification (ASJC) codes

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title = "Energy Level and Solid Solubility of Cobalt in Silicon by In-Depth Profile Measurement",

author = "Hiroshi Nakashima and Hajime Kitagawa and Kimio Hashimoto and Hajime Tomokage",

year = "1984",

month = jun,

doi = "10.1143/JJAP.23.776",

language = "English",

volume = "23",

journal = "Japanese journal of applied physics",

issn = "0021-4922",

publisher = "Institute of Physics",

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AU - Nakashima, Hiroshi

AU - Kitagawa, Hajime

AU - Hashimoto, Kimio

AU - Tomokage, Hajime

PY - 1984/6

Y1 - 1984/6

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JO - Japanese journal of applied physics

JF - Japanese journal of applied physics

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