The electron-temperature control of a 915 MHz electron cyclotron resonance (ECR) plasma was discussed. It was found that the electron temperature in an ECR plasma changes with the changing spatial profiles of the power absorption. It was also found that the electron temperature is controlled by changing the gradient in the magneticfield strength and the microwave frequency.
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - Nov 2002|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films