Electron-temperature control in 915 MHz electron cyclotron resonance plasma

N. Itagaki; Y. Kawai; S. Kawakami; Nobuo Ishii

doi:10.1116/1.1513791

Electron-temperature control in 915 MHz electron cyclotron resonance plasma

N. Itagaki, Y. Kawai, S. Kawakami, Nobuo Ishii

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6 Citations (Scopus)

Abstract

The electron-temperature control of a 915 MHz electron cyclotron resonance (ECR) plasma was discussed. It was found that the electron temperature in an ECR plasma changes with the changing spatial profiles of the power absorption. It was also found that the electron temperature is controlled by changing the gradient in the magneticfield strength and the microwave frequency.

Original language	English
Pages (from-to)	1969-1973
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	20
Issue number	6
DOIs	https://doi.org/10.1116/1.1513791
Publication status	Published - Nov 2002

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.1513791

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title = "Electron-temperature control in 915 MHz electron cyclotron resonance plasma",

abstract = "The electron-temperature control of a 915 MHz electron cyclotron resonance (ECR) plasma was discussed. It was found that the electron temperature in an ECR plasma changes with the changing spatial profiles of the power absorption. It was also found that the electron temperature is controlled by changing the gradient in the magneticfield strength and the microwave frequency.",

author = "N. Itagaki and Y. Kawai and S. Kawakami and Nobuo Ishii",

year = "2002",

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T1 - Electron-temperature control in 915 MHz electron cyclotron resonance plasma

AU - Itagaki, N.

AU - Kawai, Y.

AU - Kawakami, S.

AU - Ishii, Nobuo

PY - 2002/11

Y1 - 2002/11

N2 - The electron-temperature control of a 915 MHz electron cyclotron resonance (ECR) plasma was discussed. It was found that the electron temperature in an ECR plasma changes with the changing spatial profiles of the power absorption. It was also found that the electron temperature is controlled by changing the gradient in the magneticfield strength and the microwave frequency.

AB - The electron-temperature control of a 915 MHz electron cyclotron resonance (ECR) plasma was discussed. It was found that the electron temperature in an ECR plasma changes with the changing spatial profiles of the power absorption. It was also found that the electron temperature is controlled by changing the gradient in the magneticfield strength and the microwave frequency.

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U2 - 10.1116/1.1513791

DO - 10.1116/1.1513791

M3 - Article

AN - SCOPUS:0036863287

SN - 0734-2101

VL - 20

SP - 1969

EP - 1973

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 6

ER -

Electron-temperature control in 915 MHz electron cyclotron resonance plasma

Abstract

All Science Journal Classification (ASJC) codes

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