Electron microscopy studies of microstructures in β-Ga2O3 single crystals

Encarnación G. Víllora, Yasukazu Murakami, Takasi Sugawara, Toshiyuki Atou, Masae Kikuchi, Daisuke Shindo, Tsuguo Fukuda

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21 Citations (Scopus)


Microstructures of as-grown and annealed β-Ga2O3 single crystals were studied by electron microscopy. Energy filtered electron diffraction patterns exhibited weak diffuse scattering at 1/2 and 1/4 positions between the fundamental reflections along the q204̄ vector. Dark-field images observed with the 1/2 diffuse scattering showed a characteristic domain-like structure, where the size of each domain was less than 5nm. The diffused scattering was somewhat weakened by annealing the specimen. The observations indicate a non-homogeneous structural modulation, which is considered to be related to the distribution of oxygen vacancies.

Original languageEnglish
Pages (from-to)769-774
Number of pages6
JournalMaterials Research Bulletin
Issue number4
Publication statusPublished - Mar 25 2002
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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