Electrodeposition of refractory metals from some ZnCl2-based molten salts at 150-250°C

Toshiyuki Nohira; Hironori Nakajima; Kan Kitagawa; Rika Hagiwara; Kouji Nitta; Shinji Inazawa; Kazunori Okada

doi:10.1149/1.2798676

Electrodeposition of refractory metals from some ZnCl₂-based molten salts at 150-250°C

Toshiyuki Nohira, Hironori Nakajima, Kan Kitagawa, Rika Hagiwara, Kouji Nitta, Shinji Inazawa, Kazunori Okada

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

The solubility of WO₃ in a eutectic NaCl-KCl-ZnCl₂ (20:20:60 mol%) melt at 250°C was increased by addition of KF, which enabled the electrodeposition of metallic tungsten. A smooth and dense tungsten film having 0.7 μm thickness was obtained on a nickel substrate by potentiostatic electrolysis at 0.06 V vs. Zn(II)ZZn for 3 h in the NaCl-KCl-ZnCl ₂-KF(4 mol% added)-WO₃(0.54 mol% added) melt at 250°C The surface of the nickel contact probe pin for semiconductor testing, which had been manufactured by the conventional LIGA process, was successfully coated with tungsten by using this molten salt. To lower the electrodeposition temperature, a new molten salt system, EMPyrCl-ZnCl₂, was developed. An equimolar EMPyrCl-ZnCl₂ system was a stable liquid at 40-200°C A metallic molybdenum film was electrodeposited on a nickel substrate in the melt containing KF and MoCl₅ at 150°C. copyright The Electrochemical Society.

Original language	English
Title of host publication	ECS Transactions - 15th International Symposium on Molten Salts
Publisher	Electrochemical Society Inc.
Pages	333-340
Number of pages	8
Edition	35
ISBN (Electronic)	9781566775922
ISBN (Print)	9781566775922
DOIs	https://doi.org/10.1149/1.2798676
Publication status	Published - 2006
Externally published	Yes
Event	15th International Symposium on Molten Salts - 210th ECS Meeting - Cancun, Mexico Duration: Oct 29 2006 → Nov 3 2006

Publication series

Name	ECS Transactions
Number	35
Volume	3
ISSN (Print)	1938-5862
ISSN (Electronic)	1938-6737

Other

Other	15th International Symposium on Molten Salts - 210th ECS Meeting
Country/Territory	Mexico
City	Cancun
Period	10/29/06 → 11/3/06

All Science Journal Classification (ASJC) codes

General Engineering

Access to Document

10.1149/1.2798676

Cite this

Nohira, T., Nakajima, H., Kitagawa, K., Hagiwara, R., Nitta, K., Inazawa, S., & Okada, K. (2006). Electrodeposition of refractory metals from some ZnCl₂-based molten salts at 150-250°C. In ECS Transactions - 15th International Symposium on Molten Salts (35 ed., pp. 333-340). (ECS Transactions; Vol. 3, No. 35). Electrochemical Society Inc.. https://doi.org/10.1149/1.2798676

Electrodeposition of refractory metals from some ZnCl₂-based molten salts at 150-250°C. / Nohira, Toshiyuki; Nakajima, Hironori; Kitagawa, Kan et al.
ECS Transactions - 15th International Symposium on Molten Salts. 35. ed. Electrochemical Society Inc., 2006. p. 333-340 (ECS Transactions; Vol. 3, No. 35).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nohira, T, Nakajima, H, Kitagawa, K, Hagiwara, R, Nitta, K, Inazawa, S & Okada, K 2006, Electrodeposition of refractory metals from some ZnCl₂-based molten salts at 150-250°C. in ECS Transactions - 15th International Symposium on Molten Salts. 35 edn, ECS Transactions, no. 35, vol. 3, Electrochemical Society Inc., pp. 333-340, 15th International Symposium on Molten Salts - 210th ECS Meeting, Cancun, Mexico, 10/29/06. https://doi.org/10.1149/1.2798676

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title = "Electrodeposition of refractory metals from some ZnCl2-based molten salts at 150-250°C",

abstract = "The solubility of WO3 in a eutectic NaCl-KCl-ZnCl2 (20:20:60 mol%) melt at 250°C was increased by addition of KF, which enabled the electrodeposition of metallic tungsten. A smooth and dense tungsten film having 0.7 μm thickness was obtained on a nickel substrate by potentiostatic electrolysis at 0.06 V vs. Zn(II)ZZn for 3 h in the NaCl-KCl-ZnCl 2-KF(4 mol% added)-WO3(0.54 mol% added) melt at 250°C The surface of the nickel contact probe pin for semiconductor testing, which had been manufactured by the conventional LIGA process, was successfully coated with tungsten by using this molten salt. To lower the electrodeposition temperature, a new molten salt system, EMPyrCl-ZnCl2, was developed. An equimolar EMPyrCl-ZnCl2 system was a stable liquid at 40-200°C A metallic molybdenum film was electrodeposited on a nickel substrate in the melt containing KF and MoCl5 at 150°C. copyright The Electrochemical Society.",

author = "Toshiyuki Nohira and Hironori Nakajima and Kan Kitagawa and Rika Hagiwara and Kouji Nitta and Shinji Inazawa and Kazunori Okada",

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AU - Nohira, Toshiyuki

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N2 - The solubility of WO3 in a eutectic NaCl-KCl-ZnCl2 (20:20:60 mol%) melt at 250°C was increased by addition of KF, which enabled the electrodeposition of metallic tungsten. A smooth and dense tungsten film having 0.7 μm thickness was obtained on a nickel substrate by potentiostatic electrolysis at 0.06 V vs. Zn(II)ZZn for 3 h in the NaCl-KCl-ZnCl 2-KF(4 mol% added)-WO3(0.54 mol% added) melt at 250°C The surface of the nickel contact probe pin for semiconductor testing, which had been manufactured by the conventional LIGA process, was successfully coated with tungsten by using this molten salt. To lower the electrodeposition temperature, a new molten salt system, EMPyrCl-ZnCl2, was developed. An equimolar EMPyrCl-ZnCl2 system was a stable liquid at 40-200°C A metallic molybdenum film was electrodeposited on a nickel substrate in the melt containing KF and MoCl5 at 150°C. copyright The Electrochemical Society.

AB - The solubility of WO3 in a eutectic NaCl-KCl-ZnCl2 (20:20:60 mol%) melt at 250°C was increased by addition of KF, which enabled the electrodeposition of metallic tungsten. A smooth and dense tungsten film having 0.7 μm thickness was obtained on a nickel substrate by potentiostatic electrolysis at 0.06 V vs. Zn(II)ZZn for 3 h in the NaCl-KCl-ZnCl 2-KF(4 mol% added)-WO3(0.54 mol% added) melt at 250°C The surface of the nickel contact probe pin for semiconductor testing, which had been manufactured by the conventional LIGA process, was successfully coated with tungsten by using this molten salt. To lower the electrodeposition temperature, a new molten salt system, EMPyrCl-ZnCl2, was developed. An equimolar EMPyrCl-ZnCl2 system was a stable liquid at 40-200°C A metallic molybdenum film was electrodeposited on a nickel substrate in the melt containing KF and MoCl5 at 150°C. copyright The Electrochemical Society.

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