TY - GEN
T1 - Efficient silicon nitride grating coupler with a dielectric multilayer reflector
AU - Hong, Jianxun
AU - Yokoyama, Shiyoshi
N1 - Funding Information:
This work is partially supported by the Cooperative Research Programs of “Network Joint Research Center for Material and Device” and “Dynamic Alliance for Open Innovation Bridging Human, Environment, and materials” of MEXT, JSPS KAKENHI Grant Nos. 26289108 and 266220712, and the Strategic Promotion of Innovative Research and Development (S-innovation, 200903006) of JST.
Publisher Copyright:
© 2017 The Japan Society of Applied Physics.
PY - 2017/11/19
Y1 - 2017/11/19
N2 - A highly efficient grating coupler with a dielectric multilayer reflector for silicon nitride photonic integrated circuits was proposed. Design, fabrication and optical characterization were presented. The peak coupling efficiency and 3 dB bandwidth are -4.5 dB and 68.0 nm, respectively. The fabrication process is CMOS-compatible with only one etching step.
AB - A highly efficient grating coupler with a dielectric multilayer reflector for silicon nitride photonic integrated circuits was proposed. Design, fabrication and optical characterization were presented. The peak coupling efficiency and 3 dB bandwidth are -4.5 dB and 68.0 nm, respectively. The fabrication process is CMOS-compatible with only one etching step.
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U2 - 10.23919/MOC.2017.8244493
DO - 10.23919/MOC.2017.8244493
M3 - Conference contribution
AN - SCOPUS:85045835808
T3 - 22nd Microoptics Conference, MOC 2017
SP - 58
EP - 59
BT - 22nd Microoptics Conference, MOC 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 22nd Microoptics Conference, MOC 2017
Y2 - 19 November 2017 through 22 November 2017
ER -