Effects of resist thickness and viscoelasticity on the cavity filling capability in bilayer thermal embossing (Special issue: Microprocesses and nanotechnology)

Y. Xu, Fujio Tsumori, Takuya Toyooka

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)06GK11-1〜5
JournalJapanese Journal of Applied Physics, Part 2: Letters
Issue number6
Publication statusPublished - Jun 2011

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