TY - JOUR
T1 - Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency
AU - Hashimoto, Y.
AU - Toko, S.
AU - Yamashita, D.
AU - Seo, H.
AU - Kamataki, K.
AU - Itagaki, N.
AU - Koga, K.
AU - Shiratani, M.
PY - 2014
Y1 - 2014
N2 - We have developed a cluster-eliminating filter which reduces amount of amorphous silicon nanoparticles (clusters) incorporated into a-Si:H films. We have measured film thickness dependence of a ratio of a hydrogen content associated with Si-H2 bonds (CSiH2) to that with Si-H bonds (CSiH) as a parameter of the filter gap (dgap). The cluster removal efficiency increases with decreasing dgap. CSiH2 and the ratio of CSiH2 to CSiH decrease with increasing the film thickness, suggesting the amount of incorporated clusters is high near the interface between the film and the substrate.
AB - We have developed a cluster-eliminating filter which reduces amount of amorphous silicon nanoparticles (clusters) incorporated into a-Si:H films. We have measured film thickness dependence of a ratio of a hydrogen content associated with Si-H2 bonds (CSiH2) to that with Si-H bonds (CSiH) as a parameter of the filter gap (dgap). The cluster removal efficiency increases with decreasing dgap. CSiH2 and the ratio of CSiH2 to CSiH decrease with increasing the film thickness, suggesting the amount of incorporated clusters is high near the interface between the film and the substrate.
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U2 - 10.1088/1742-6596/518/1/012007
DO - 10.1088/1742-6596/518/1/012007
M3 - Conference article
AN - SCOPUS:84903476314
SN - 1742-6588
VL - 518
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012007
T2 - 26th Symposium on Plasma Sciences for Materials, SPSM 2013
Y2 - 23 September 2013 through 24 September 2013
ER -