Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency

Y. Hashimoto, S. Toko, D. Yamashita, H. Seo, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani

Research output: Contribution to journalConference articlepeer-review

5 Citations (Scopus)


We have developed a cluster-eliminating filter which reduces amount of amorphous silicon nanoparticles (clusters) incorporated into a-Si:H films. We have measured film thickness dependence of a ratio of a hydrogen content associated with Si-H2 bonds (CSiH2) to that with Si-H bonds (CSiH) as a parameter of the filter gap (dgap). The cluster removal efficiency increases with decreasing dgap. CSiH2 and the ratio of CSiH2 to CSiH decrease with increasing the film thickness, suggesting the amount of incorporated clusters is high near the interface between the film and the substrate.

Original languageEnglish
Article number012007
JournalJournal of Physics: Conference Series
Issue number1
Publication statusPublished - 2014
Event26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, Japan
Duration: Sept 23 2013Sept 24 2013

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)


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