@inproceedings{57ba8689325c4e02adee753d1b21c1f8,
title = "Effect of film thickness on electrical and optical properties of ZnO/Ag dual layer film",
abstract = "ZnO/Ag dual layer films were deposited on glass substrates by DC magnetron sputtering method to clarify the effect of film thickness on the electrical and optical properties. Both the Ag film and the ZnO film were deposited with different thickness. The electrical and optical properties of the dual layer film were mainly changed by the Ag film thickness. The sheet resistance of 2.3 ohm/sq with transmittance over 80% in the visible light was obtained under the deposition time of 30 seconds for Ag and 30 minutes for ZnO film. From the result of SEM observations, the Ag was deposited on the glass substrate as discontinuous structure. Therefore, ZnO/Ag dual layer film will be expected for good performance in the transparent electrode.",
author = "Hiromi Yabe and Eri Akita and Pangpang Wang and Daisuke Yonekura and Murakami, {Ri Ichi} and Xiaoping Song",
year = "2012",
doi = "10.1002/9781118511428.ch17",
language = "English",
isbn = "9781118273272",
series = "Ceramic Transactions",
publisher = "American Ceramic Society",
pages = "149--155",
booktitle = "Advances in Synthesis, Processing, and Applications of Nanostructures",
address = "United States",
note = "Advances in Synthesis, Processing, and Applications of Nanostructures - Materials Science and Technology 2011 Conference, MS and T 2011 ; Conference date: 16-10-2011 Through 20-10-2011",
}