TY - JOUR
T1 - Effect of contamination on quantitative X-ray microanalysis in the analytical electron microscope
AU - Horita, Z.
AU - Sano, T.
AU - Nemoto, M.
N1 - Funding Information:
The work of one of us (Z.H.) was supported in part by Grant-in-Aid for Encouragement of Young Scientists from the Ministry of Education, Science and Culture of Japan. An analytical electron microscope (JEM-2000FX) in the High-Voltage Electron Microscopy Laboratory of Kyushu University was used to obtain the present results.
PY - 1991/4
Y1 - 1991/4
N2 - It is shown that the contamination on a specimen surface leads to reduction of the characteristic intensities of low-energy lines because of the absorption. The X-ray path length in the contamination deposit which builds up in cone-shape by illumination of a finely focused electron beam is estimated from the reduction of characteristic intensities and compared with the average path length derived from the geometry of the deposit. The critical path length is introduced to define the negligible absorption in contamination for the characteristic lines of energies up to a few kilo electron volts.
AB - It is shown that the contamination on a specimen surface leads to reduction of the characteristic intensities of low-energy lines because of the absorption. The X-ray path length in the contamination deposit which builds up in cone-shape by illumination of a finely focused electron beam is estimated from the reduction of characteristic intensities and compared with the average path length derived from the geometry of the deposit. The critical path length is introduced to define the negligible absorption in contamination for the characteristic lines of energies up to a few kilo electron volts.
UR - http://www.scopus.com/inward/record.url?scp=0026139414&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0026139414&partnerID=8YFLogxK
U2 - 10.1080/13642819108205551
DO - 10.1080/13642819108205551
M3 - Article
AN - SCOPUS:0026139414
SN - 1364-2812
VL - 63
SP - 965
EP - 978
JO - Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
JF - Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
IS - 4
ER -