Abstract
Spatial distributions of electron density (ne) and electron temperature (Te) of a micro-discharge plasma for an alternating current plasma display panel cell were directly measured using the laser Thomson scattering method. The use of a triple-grating spectrometer was very successful in suppressing the strong stray laser light and allowed us to perform measurements at 0.1 mm above the surface of the electrode substrate. Values of ne and Te were (0.2-3)×1019m-3 and (1.6-3.4) eV, respectively, depending on the time from the beginning of the pulsed discharge and the observation position. The structure of the micro-discharge is discussed in terms of the obtained distributions of ne and Te.
Original language | English |
---|---|
Pages (from-to) | 613-616 |
Number of pages | 4 |
Journal | Journal of Applied Physics |
Volume | 91 |
Issue number | 2 |
DOIs | |
Publication status | Published - Jan 15 2002 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)