TY - GEN
T1 - Direct comparison of emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced plasmas with solid tin target
AU - Tanaka, Hiroki
AU - Matsumoto, Atsushi
AU - Akinaga, Kouzi
AU - Takahashi, Akihiko
AU - Okada, Tatsuo
PY - 2005
Y1 - 2005
N2 - In this paper, we report the emission characteristics of extreme ultraviolet radiation at 13.5 nm from the CO2 and the Nd:YAG laser-produced plasmas with a solid tin target measured by the same measurement system.
AB - In this paper, we report the emission characteristics of extreme ultraviolet radiation at 13.5 nm from the CO2 and the Nd:YAG laser-produced plasmas with a solid tin target measured by the same measurement system.
UR - http://www.scopus.com/inward/record.url?scp=33846517533&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33846517533&partnerID=8YFLogxK
U2 - 10.1109/IQEC.2005.1561042
DO - 10.1109/IQEC.2005.1561042
M3 - Conference contribution
AN - SCOPUS:33846517533
SN - 078039240X
SN - 9780780392403
T3 - IQEC, International Quantum Electronics Conference Proceedings
SP - 1151
EP - 1152
BT - International Quantum Electronics Conference 2005
ER -