TY - JOUR
T1 - Dimensional measurement of microform with high aspect ratio using an optically controlled particle with standing wave scale sensing
AU - Takaya, Yasuhiro
AU - Michihata, Masaki
AU - Hayashi, Terutake
AU - Washitani, Taisuke
N1 - Copyright:
Copyright 2012 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - A new measurement technique based on the localized optical interference scale formed by a standing wave is proposed. The scale is sensed using a microprobe controlled three dimensionally by radiation pressure. The feasibility of this novel probing technique is examined by measuring the depth of a micro-groove using the displacement sensing method based on a coordinate measurement system. Since the effective length of the standing wave scale is more than 250 μm, the microprobe enables us to measure a micro-fine figure with a high aspect ratio.
AB - A new measurement technique based on the localized optical interference scale formed by a standing wave is proposed. The scale is sensed using a microprobe controlled three dimensionally by radiation pressure. The feasibility of this novel probing technique is examined by measuring the depth of a micro-groove using the displacement sensing method based on a coordinate measurement system. Since the effective length of the standing wave scale is more than 250 μm, the microprobe enables us to measure a micro-fine figure with a high aspect ratio.
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U2 - 10.1016/j.cirp.2012.03.114
DO - 10.1016/j.cirp.2012.03.114
M3 - Article
AN - SCOPUS:84861600794
SN - 0007-8506
VL - 61
SP - 479
EP - 482
JO - CIRP Annals - Manufacturing Technology
JF - CIRP Annals - Manufacturing Technology
IS - 1
ER -