TY - JOUR
T1 - Diamond deposition and behavior of atomic carbon species in a low-pressure inductively coupled plasma
AU - Ito, Haruhiko
AU - Teii, Kungen
AU - Ishikawa, Masayuki
AU - Ito, Masafumi
AU - Hori, Masaru
AU - Takeo, Takashi
AU - Kato, Terumasa
AU - Goto, Toshio
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 1999/7
Y1 - 1999/7
N2 - Diamond was successfully synthesized by using H2-rich CH4/CO/H2 and H2-rich CH4/H2 inductively coupled plasma at a pressure of 11 Pa. The ratio of particle size to deposition time, as a criterion of the diamond growth rate, in H2-rich CH4/CO/H2 mixture gas plasmas was higher than that in H2-rich CH4/H2 mixture gas plasmas. The deposits in H2-rich CH4/H2 and H2-rich CH4/CO/H2 mixture gas plasmas were found to contain nondiamond phases, as confirmed by Raman spectroscopy. In order to investigate the mechanism involved in diamond formation, C-atom densities in the plasmas were measured by vacuum ultraviolet absorption spectroscopy with a carbon hollow cathode lamp. In addition, CH, OH and H-atom emission intensities were measured by optical emission spectroscopy. As a result, it was found that the C-atom densities increased considerably with increasing mixture ratio of CO to CH4. On the basis of the correlation between the quality of deposits and the C-atom densities, C-atoms were determined to probably contribute to the formation of nondiamond phases in the deposits.
AB - Diamond was successfully synthesized by using H2-rich CH4/CO/H2 and H2-rich CH4/H2 inductively coupled plasma at a pressure of 11 Pa. The ratio of particle size to deposition time, as a criterion of the diamond growth rate, in H2-rich CH4/CO/H2 mixture gas plasmas was higher than that in H2-rich CH4/H2 mixture gas plasmas. The deposits in H2-rich CH4/H2 and H2-rich CH4/CO/H2 mixture gas plasmas were found to contain nondiamond phases, as confirmed by Raman spectroscopy. In order to investigate the mechanism involved in diamond formation, C-atom densities in the plasmas were measured by vacuum ultraviolet absorption spectroscopy with a carbon hollow cathode lamp. In addition, CH, OH and H-atom emission intensities were measured by optical emission spectroscopy. As a result, it was found that the C-atom densities increased considerably with increasing mixture ratio of CO to CH4. On the basis of the correlation between the quality of deposits and the C-atom densities, C-atoms were determined to probably contribute to the formation of nondiamond phases in the deposits.
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U2 - 10.1143/jjap.38.4504
DO - 10.1143/jjap.38.4504
M3 - Article
AN - SCOPUS:0033157448
SN - 0021-4922
VL - 38
SP - 4504
EP - 4507
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 7 B
ER -