TY - GEN
T1 - Diagnostics of ablation dynamics of Tin micro-Droplet for EUV lithography light source
AU - Nakamura, D.
AU - Okazaki, K.
AU - Akiyama, T.
AU - Toya, K.
AU - Takahashi, A.
AU - Okada, T.
AU - Yanagida, T.
AU - Ueno, Y.
AU - Sasaki, Y.
AU - Suganuma, T.
AU - Nakano, M.
AU - Komori, H.
AU - Sumitani, A.
AU - Endo, A.
PY - 2009
Y1 - 2009
N2 - The ablation dynamics of tin micro-droplet target irradiated by double pulses was investigated for extreme ultraviolet lithography source. Debris from Sn droplet target was visualized by the laser-induced fluorescence imaging and shadowgraph imaging.
AB - The ablation dynamics of tin micro-droplet target irradiated by double pulses was investigated for extreme ultraviolet lithography source. Debris from Sn droplet target was visualized by the laser-induced fluorescence imaging and shadowgraph imaging.
UR - http://www.scopus.com/inward/record.url?scp=84894065100&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84894065100&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84894065100
SN - 9781424438303
T3 - Optics InfoBase Conference Papers
BT - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009
T2 - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009
Y2 - 30 August 2009 through 3 September 2009
ER -