TY - GEN
T1 - Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source
AU - Matsumoto, Atsushi
AU - Tanaka, Hiroki
AU - Akinaga, Kouji
AU - Takahashi, Akihiko
AU - Okada, Tatsuo
PY - 2005
Y1 - 2005
N2 - In order to understand the behavior of neutral particles in laser-produced plasmas used for the extreme ultraviolet light source, we have been developing a visualization system of neural particles by means of planar Rayleigh scattering and planar laser-induced fluorescence spectroscopy (LIF). Based on the measurement, influence of EUV light absorption and kinetics of Sn plasma are discussed.
AB - In order to understand the behavior of neutral particles in laser-produced plasmas used for the extreme ultraviolet light source, we have been developing a visualization system of neural particles by means of planar Rayleigh scattering and planar laser-induced fluorescence spectroscopy (LIF). Based on the measurement, influence of EUV light absorption and kinetics of Sn plasma are discussed.
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UR - http://www.scopus.com/inward/citedby.url?scp=33847152247&partnerID=8YFLogxK
U2 - 10.1109/CLEOPR.2005.1569794
DO - 10.1109/CLEOPR.2005.1569794
M3 - Conference contribution
AN - SCOPUS:33847152247
SN - 0780392426
SN - 9780780392427
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
SP - 1500
EP - 1501
BT - Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
T2 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Y2 - 11 July 2005 through 15 July 2005
ER -