Development of microscopy for lithium analysis using medium-energy ion-stimulated desorption

Takane Kobayashi; Atsushi Kamoshida; Hideo Akiyama; Ken Watanabe; Tsuyoshi Ohnishi; Kazunori Takada; Taku T. Suzuki

doi:10.7567/APEX.7.106601

Development of microscopy for lithium analysis using medium-energy ion-stimulated desorption

Takane Kobayashi, Atsushi Kamoshida, Hideo Akiyama, Ken Watanabe, Tsuyoshi Ohnishi, Kazunori Takada, Taku T. Suzuki

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A medium-energy ion-stimulated desorption spectroscope was combined with a helium ion microscope to develop a microscope for lithium (Li) analysis with high spatial resolution below 10nm. The analysis of Li is based on time-of-flight (TOF) spectroscopy. A clear Li peak was observed in the TOF spectra for the samples containing Li. The capability of the microscope was demonstrated using a LiCoO₂/Nb doped SrTiO₃ sample. Furthermore, the Li distribution on the sample was successfully observed by measuring the Li+ peak intensity as a function of the helium irradiation position.

Original language	English
Article number	106601
Journal	Applied Physics Express
Volume	7
Issue number	10
DOIs	https://doi.org/10.7567/APEX.7.106601
Publication status	Published - Oct 1 2014
Externally published	Yes

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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10.7567/APEX.7.106601

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title = "Development of microscopy for lithium analysis using medium-energy ion-stimulated desorption",

abstract = "A medium-energy ion-stimulated desorption spectroscope was combined with a helium ion microscope to develop a microscope for lithium (Li) analysis with high spatial resolution below 10nm. The analysis of Li is based on time-of-flight (TOF) spectroscopy. A clear Li peak was observed in the TOF spectra for the samples containing Li. The capability of the microscope was demonstrated using a LiCoO2/Nb doped SrTiO3 sample. Furthermore, the Li distribution on the sample was successfully observed by measuring the Li+ peak intensity as a function of the helium irradiation position.",

author = "Takane Kobayashi and Atsushi Kamoshida and Hideo Akiyama and Ken Watanabe and Tsuyoshi Ohnishi and Kazunori Takada and Suzuki, {Taku T.}",

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AU - Kobayashi, Takane

AU - Kamoshida, Atsushi

AU - Akiyama, Hideo

AU - Watanabe, Ken

AU - Ohnishi, Tsuyoshi

AU - Takada, Kazunori

AU - Suzuki, Taku T.

N1 - Funding Information: The authors would like to thank Ms. Shoko Nagano, Dr. HongXuan Guo, and Ms. Keiko Onishi for their technical assistance and operation of the HIM. A part of this work was supported by "Nanotechnology Platform" of the Ministry of Education, Culture, Sports, Science and Technology, Japan (MEXT). Publisher Copyright: © 2014 The Japan Society of Applied Physics.

PY - 2014/10/1

Y1 - 2014/10/1

N2 - A medium-energy ion-stimulated desorption spectroscope was combined with a helium ion microscope to develop a microscope for lithium (Li) analysis with high spatial resolution below 10nm. The analysis of Li is based on time-of-flight (TOF) spectroscopy. A clear Li peak was observed in the TOF spectra for the samples containing Li. The capability of the microscope was demonstrated using a LiCoO2/Nb doped SrTiO3 sample. Furthermore, the Li distribution on the sample was successfully observed by measuring the Li+ peak intensity as a function of the helium irradiation position.

AB - A medium-energy ion-stimulated desorption spectroscope was combined with a helium ion microscope to develop a microscope for lithium (Li) analysis with high spatial resolution below 10nm. The analysis of Li is based on time-of-flight (TOF) spectroscopy. A clear Li peak was observed in the TOF spectra for the samples containing Li. The capability of the microscope was demonstrated using a LiCoO2/Nb doped SrTiO3 sample. Furthermore, the Li distribution on the sample was successfully observed by measuring the Li+ peak intensity as a function of the helium irradiation position.

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Development of microscopy for lithium analysis using medium-energy ion-stimulated desorption

Abstract

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