Development of microscopy for lithium analysis using medium-energy ion-stimulated desorption

Takane Kobayashi, Atsushi Kamoshida, Hideo Akiyama, Ken Watanabe, Tsuyoshi Ohnishi, Kazunori Takada, Taku T. Suzuki

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


A medium-energy ion-stimulated desorption spectroscope was combined with a helium ion microscope to develop a microscope for lithium (Li) analysis with high spatial resolution below 10nm. The analysis of Li is based on time-of-flight (TOF) spectroscopy. A clear Li peak was observed in the TOF spectra for the samples containing Li. The capability of the microscope was demonstrated using a LiCoO2/Nb doped SrTiO3 sample. Furthermore, the Li distribution on the sample was successfully observed by measuring the Li+ peak intensity as a function of the helium irradiation position.

Original languageEnglish
Article number106601
JournalApplied Physics Express
Issue number10
Publication statusPublished - Oct 1 2014
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)


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