Development of LEED apparatus using field-emission tips

Seigi Mizuno

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)


    Low-energy electron diffraction (LEED) apparatuses with field-emission (FE) tips were developed. The FE tips were fabricated by field-assisted gas etching to obtain an atomically sharp tip apex. These tips emit single-spot electron beams. Using the FE beams in conjunction with a lensless system, we observed backscattered electrons at the surface of few-layer graphene grown on SiC(0001). The obtained hexagonal patterns at sample biases of 93 V, 54 V, and 28 V were interpreted as diffraction spots derived from the graphene, the SiC(0001) substrate, and a buffer layer, respectively. On the basis of the opening angle of FE, the irradiated areas were estimated to be 350 nmq when the sample bias was 100 V. Since the FE beams were easily focused by a magnetic lens, a LEED apparatus with the focused FE beams was also examined. This approach might be useful for improving the sharpness of LEED patterns.

    Original languageEnglish
    Pages (from-to)52-56
    Number of pages5
    JournalJournal of the Vacuum Society of Japan
    Issue number2
    Publication statusPublished - 2016

    All Science Journal Classification (ASJC) codes

    • Materials Science(all)
    • Instrumentation
    • Surfaces and Interfaces
    • Spectroscopy


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