Abstract
We have developed a new nano-beam time-of-flight secondary neutral mass spectrometry system: laser ionization mass nanoscope or LIMAS. The primary ion beam column was equipped with a Ga liquid metal ion source and aberration correction optics. The primary ion beam was down to 40 nm in diameter under a current of 100 pA with an energy of 20 keV. The sputtered particles were post-ionized under non-resonance mode by a femtosecond laser. The post-ionized ions were introduced into a multi-turn mass spectrometer. A mass resolution of up to 40 000 was achieved. The vacuum of the sample chamber was maintained under an ultrahigh vacuum of 2×10 -8 Pa. This instrument would be effective for ultrahigh sensitive analysis of nanosized particles such as return samples from asteroids, comets, and planets.
Original language | English |
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Pages (from-to) | 635-640 |
Number of pages | 6 |
Journal | Surface and Interface Analysis |
Volume | 44 |
Issue number | 6 |
DOIs | |
Publication status | Published - Jun 2012 |
All Science Journal Classification (ASJC) codes
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry