Development of laser ionization mass nanoscope (LIMAS)

Shingo Ebata, Morio Ishihara, Kiichiro Uchino, Satoru Itose, Miyuki Matsuya, Masato Kudo, Ken Ichi Bajo, Hisayoshi Yurimoto

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


We have developed a new nano-beam time-of-flight secondary neutral mass spectrometry system: laser ionization mass nanoscope or LIMAS. The primary ion beam column was equipped with a Ga liquid metal ion source and aberration correction optics. The primary ion beam was down to 40 nm in diameter under a current of 100 pA with an energy of 20 keV. The sputtered particles were post-ionized under non-resonance mode by a femtosecond laser. The post-ionized ions were introduced into a multi-turn mass spectrometer. A mass resolution of up to 40 000 was achieved. The vacuum of the sample chamber was maintained under an ultrahigh vacuum of 2×10 -8 Pa. This instrument would be effective for ultrahigh sensitive analysis of nanosized particles such as return samples from asteroids, comets, and planets.

Original languageEnglish
Pages (from-to)635-640
Number of pages6
JournalSurface and Interface Analysis
Issue number6
Publication statusPublished - Jun 2012

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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