TY - JOUR
T1 - Development of high lateral and wide angle resolved hard X-ray photoemission spectroscopy at BL47XU in SPring-8
AU - Ikenaga, Eiji
AU - Kobata, Masaaki
AU - Matsuda, Hiroyuki
AU - Sugiyama, Takeharu
AU - Daimon, Hiroshi
AU - Kobayashi, Keisuke
N1 - Funding Information:
The author is grateful to Drs. J.J. Kim, S. Ueda, Ke yan, M. Machjida, and J.-Y. Son for their devoting works during the incubation period of HAXPES public activity at BL47XU. The author is also grateful to Drs. Y. Abe, N. Miyata, H. Nohira and H. Tanaka for providing samples. E.I. is also thankful to Dr. Y. Watanabe for his direction and support. Constructions of X-ray optics in all the HAXPES beamlines are owing to collaborations with Drs. T. Ishikawa, M. Yabashi, K. Tamasaku, Y. Nishino, K. Yamauchi and H. Mimura. The present authors (E.I., M.K., and K.K.) appreciate Dr. Yasutaka Takata, who was one of the pioneers of HAXPES developments and passed away last year, for his collaboration in the HAXPES experimental stations at SPring-8 from hearts. This development was supported by SENTAN, JST. The synchrotron radiation measurements were performed at BL47XU with the approval of the Japan Synchrotron Radiation Research Institute ( JASRI; 2010A1465 , 2010B1425 , and 2012A1355 ).
PY - 2013/10
Y1 - 2013/10
N2 - In this study, we have realized a high lateral resolution and wide-angle-resolved hard X-ray photoelectron spectroscopy (HAXPES) facility at BL47XU in SPring-8. The system uses Kirkpatrick-Baez focusing mirrors to achieve a beam size of 1.0 μm (horizontal) × 0.98 μm (vertical) at the photon energy of 7.94 keV and a wide-acceptance-angle objective lens installed in front of the electron energy analyzer. The objective lens system, which we had been developed originally and has achieved a total acceptance angle of ±34 with a resolution better than that of an acceptance angle of 1.5. The performance of this system was evaluated through core spectra measurements of a typical multi-layered sample of Ir (8 nm)/HfO2 (2.2 nm)/thickness-graded SiO2 (0-10 nm)/Si(0 0 1).
AB - In this study, we have realized a high lateral resolution and wide-angle-resolved hard X-ray photoelectron spectroscopy (HAXPES) facility at BL47XU in SPring-8. The system uses Kirkpatrick-Baez focusing mirrors to achieve a beam size of 1.0 μm (horizontal) × 0.98 μm (vertical) at the photon energy of 7.94 keV and a wide-acceptance-angle objective lens installed in front of the electron energy analyzer. The objective lens system, which we had been developed originally and has achieved a total acceptance angle of ±34 with a resolution better than that of an acceptance angle of 1.5. The performance of this system was evaluated through core spectra measurements of a typical multi-layered sample of Ir (8 nm)/HfO2 (2.2 nm)/thickness-graded SiO2 (0-10 nm)/Si(0 0 1).
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U2 - 10.1016/j.elspec.2013.04.004
DO - 10.1016/j.elspec.2013.04.004
M3 - Article
AN - SCOPUS:84890116344
SN - 0368-2048
VL - 190
SP - 180
EP - 187
JO - Journal of Electron Spectroscopy and Related Phenomena
JF - Journal of Electron Spectroscopy and Related Phenomena
IS - PART B
ER -