@inproceedings{5d73b2875d014a00959092c23796a62d,
title = "Development of a system for 3-d micro metrology using an optical fiber probe",
author = "Hiroshi Murakami and Akio Katsuki and Hiromichi Onikura and Takao Sajima and Norio Kawagoishi and Eiji Kondo",
year = "2010",
month = dec,
day = "1",
language = "English",
isbn = "9781887706568",
series = "Proceedings - ASPE 2010 Annual Meeting",
pages = "69--72",
booktitle = "Proceedings - ASPE 2010 Annual Meeting",
note = "25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 ; Conference date: 31-10-2010 Through 04-11-2010",
}