TY - GEN
T1 - Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes
AU - Inokuchi, M.
AU - Ando, H.
AU - Kinosita, M.
AU - Akase, K.
AU - Higurashi, Eiji
AU - Sawada, R.
PY - 2009
Y1 - 2009
N2 - We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.
AB - We have developed an ultra-micro displacement sensor (Size:1.3mmx1.3mmx1. 3mm) consisting of two-dimensionally distributed monolithically integrated photodiodes (PD) and a vertical cavity surface emitting laser (VCSEL). The sensor size is not only very small, about one hundredth the size of conventional types of this sensor, but it also has a wider measurement range and discrimination of the external mirror shape can be enabled.
UR - https://www.scopus.com/pages/publications/71749102498
UR - https://www.scopus.com/pages/publications/71749102498#tab=citedBy
U2 - 10.1109/OMEMS.2009.5338576
DO - 10.1109/OMEMS.2009.5338576
M3 - Conference contribution
AN - SCOPUS:71749102498
SN - 9781424423828
T3 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
SP - 119
EP - 120
BT - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
T2 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Y2 - 17 August 2009 through 20 August 2009
ER -