Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions

K. Maehata; N. Iyomoto; M. Maeda; S. Ezaki; A. Takano; S. Matsumura; T. Hara; K. Mitsuda; N. Y. Yamasaki; K. Tanaka

doi:10.1007/s10909-014-1113-9

Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions

K. Maehata, N. Iyomoto, M. Maeda, S. Ezaki, A. Takano, S. Matsumura, T. Hara, K. Mitsuda, N. Y. Yamasaki, K. Tanaka

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta₂2O₅ insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- μ m-type microcalorimeter.

Original language	English
Pages (from-to)	578-583
Number of pages	6
Journal	Journal of Low Temperature Physics
Volume	176
Issue number	3-4
DOIs	https://doi.org/10.1007/s10909-014-1113-9
Publication status	Published - Aug 2014

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Materials Science(all)
Condensed Matter Physics

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10.1007/s10909-014-1113-9

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title = "Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions",

abstract = "A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta22O5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- μ m-type microcalorimeter.",

author = "K. Maehata and N. Iyomoto and M. Maeda and S. Ezaki and A. Takano and S. Matsumura and T. Hara and K. Mitsuda and Yamasaki, {N. Y.} and K. Tanaka",

note = "Funding Information: Acknowledgments The authors thank T. Hasuo for technical support. This work was financially supported by SENTAN, Japan Science and Technology Agency (JST) and a Grant-in Aid for Scientific Research (B) (24360397) from the Japan Society for Promotion of Science.",

year = "2014",

month = aug,

doi = "10.1007/s10909-014-1113-9",

language = "English",

volume = "176",

pages = "578--583",

journal = "Journal of Low Temperature Physics",

issn = "0022-2291",

publisher = "Springer New York",

number = "3-4",

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TY - JOUR

T1 - Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions

AU - Maehata, K.

AU - Iyomoto, N.

AU - Maeda, M.

AU - Ezaki, S.

AU - Takano, A.

AU - Matsumura, S.

AU - Hara, T.

AU - Mitsuda, K.

AU - Yamasaki, N. Y.

AU - Tanaka, K.

N1 - Funding Information: Acknowledgments The authors thank T. Hasuo for technical support. This work was financially supported by SENTAN, Japan Science and Technology Agency (JST) and a Grant-in Aid for Scientific Research (B) (24360397) from the Japan Society for Promotion of Science.

PY - 2014/8

Y1 - 2014/8

N2 - A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta22O5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- μ m-type microcalorimeter.

AB - A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was developed for energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 120- or 50-nm thickness. The absorber is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta22O5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. Two types of microcalorimeter were fabricated with differing absorber thicknesses of 0.5 and 5.0 μ m. An energy resolution of 15 eV FWHM with 5.9-keV X-rays was obtained using the 0.5- μ m-type microcalorimeter.

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DO - 10.1007/s10909-014-1113-9

M3 - Article

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SN - 0022-2291

VL - 176

SP - 578

EP - 583

JO - Journal of Low Temperature Physics

JF - Journal of Low Temperature Physics

IS - 3-4

ER -

Development of 4-pixel-array TES microcalorimeters with mushroom-shaped absorbers with insulating layers supporting overhang regions

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All Science Journal Classification (ASJC) codes

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