Detection of hydrogen atoms in silane plasmas using laser-induced fluorescence by Lyman-alpha two-photon and simultaneous Balmer-alpha excitations

K. Miyazaki, T. Kajiwara, Kiichiro Uchino, K. Muraoka, T. Okada, M. Maeda

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

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Physics