Detection of CF4 Gas Using a Nanomaterial-Based Gas Sensor Fabricated by Dielectrophoresis

Nisarut Phansiri, Daichi Maenosono, Takumi Furumoto, Hidefumi Sato, Michihiko Nakano, Junya Suehiro

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)


Partial and arc discharge in gas insulated switchgear (GIS), such as a switching component or circuit breaker, can lead decomposition gas generation of sulphur hexafluoride (SF6), which is generally used as an electrical insulation medium. The authors had demonstrated that SF6 decomposition products, such as HF, SO2, SOF2, can be detected by using a carbon nanotube (CNT) gas sensor, which was fabricated by dielectrophoresis. In this study, we selected carbon tetrafluoride (CF4) as a target decomposition gas to be detected by nanomaterial-based gas sensors. Because CF4 is hard to be removed by using a molecular sieve or absorbent, the decomposition product accumulates in a long time and can be used for GIS diagnosis. Three kinds of semiconducting nanomaterial, carbon nanotube, SnO2 nanoparticle, ZnO nanowires, were integrated on a microelectrode by dielectrophoresis respectively to fabricate a gas sensor. It was found that SnO2 gas sensor showed the highest response to CF4 gas at 1% concentration in SF6. The conductance of the SnO2 sensor gradually decreased with elapsed time after exposure to the CF4 gas depending on the operating temperature.

Original languageEnglish
Title of host publicationProceedings of the 21st International Symposium on High Voltage Engineering - Volume 1
EditorsBálint Németh
PublisherSpringer Science and Business Media Deutschland GmbH
Number of pages8
ISBN (Print)9783030316754
Publication statusPublished - 2020
Event21st International Symposium on High Voltage Engineering, ISH 2019 - Budapest, Hungary
Duration: Aug 26 2019Aug 30 2019

Publication series

NameLecture Notes in Electrical Engineering
Volume598 LNEE
ISSN (Print)1876-1100
ISSN (Electronic)1876-1119


Conference21st International Symposium on High Voltage Engineering, ISH 2019

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering


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