Detection methods of diamond diffraction peaks in ultrananocrystalline diamond/amorphous carbon composite films by X-ray diffraction measurement with semiconductor counter detector

Ultrananocrystalline diamond (UNCD)/amorphous carbon (a-C) composite films were fabricated by a coaxial arc plasma deposition (CAPD) method. Hereafter, UNCD with crystallite diameters of less than 10nm in an a-C matrix could only be unambiguously detected by powder X-ray diffraction measurement using a synchrotron radiation source (SR-XRD) or transmission electron microscopy (TEM) observation. In this study, we succeeded in detecting diffraction peaks due to diamond-111 in the film by X-ray diffraction (XRD) using a Cu-K? radiation source with a semiconductor counter detector. The obtained data were in agreement with the powder SR-XRD measurements of the deposited films.