Design of Compact and High Q-Factor W-Band Cavity in 0.18-µm CMOS Technology

Tomoki Fukuda, Baichuan Chen, Samundra K. Thapa, Mohamed Mohamed Barakat Adel Tawfik, Ramesh K. Pokharel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


This paper proposes a compact, high quality (Q-) factor cavity in commercial CMOS technology for terahertz band applications. The proposed cavity consists of a folded quarter-mode substrate integrated waveguide (QMSIW) topology. It also outlines some guidelines for creating layouts with specific foundries, particularly for building vertical walls using an array of vias. The cavity was implemented in 0.18 µm CMOS technology and measurements were taken. The measurements showed that the resonant frequency and reflection coefficient were 96.9 GHz and -30.14 dB, respectively, in good agreement with the simulation results. The area of the proposed cavity was 0.0506 mm2 without measurement pads, which is only 2.4% and 8.9% when compared to the standard full-mode SIW cavity and the recently proposed 87 GHz.

Original languageEnglish
Title of host publication2021 51st European Microwave Conference, EuMC 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Electronic)9782874870637
Publication statusPublished - 2021
Event51st European Microwave Conference, EuMC 2021 - London, United Kingdom
Duration: Apr 4 2022Apr 6 2022

Publication series

Name2021 51st European Microwave Conference, EuMC 2021


Conference51st European Microwave Conference, EuMC 2021
Country/TerritoryUnited Kingdom

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation


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