TY - GEN
T1 - Design of Compact and High Q-Factor W-Band Cavity in 0.18-µm CMOS Technology
AU - Fukuda, Tomoki
AU - Chen, Baichuan
AU - Thapa, Samundra K.
AU - Barakat Adel Tawfik, Mohamed Mohamed
AU - Pokharel, Ramesh K.
N1 - Funding Information:
ACKNOWLEDGMENT This work was supported in part by Casio Science Foundation, in part by The Murata Science Foundation, in part by the Telecommunication Advancement Foundation, in part by the VLSI Design and Education Center (VDEC), The University of Tokyo in collaboration with Cadence and Keysight Corporation
Publisher Copyright:
© 2022 European Microwave Association.
PY - 2021
Y1 - 2021
N2 - This paper proposes a compact, high quality (Q-) factor cavity in commercial CMOS technology for terahertz band applications. The proposed cavity consists of a folded quarter-mode substrate integrated waveguide (QMSIW) topology. It also outlines some guidelines for creating layouts with specific foundries, particularly for building vertical walls using an array of vias. The cavity was implemented in 0.18 µm CMOS technology and measurements were taken. The measurements showed that the resonant frequency and reflection coefficient were 96.9 GHz and -30.14 dB, respectively, in good agreement with the simulation results. The area of the proposed cavity was 0.0506 mm2 without measurement pads, which is only 2.4% and 8.9% when compared to the standard full-mode SIW cavity and the recently proposed 87 GHz.
AB - This paper proposes a compact, high quality (Q-) factor cavity in commercial CMOS technology for terahertz band applications. The proposed cavity consists of a folded quarter-mode substrate integrated waveguide (QMSIW) topology. It also outlines some guidelines for creating layouts with specific foundries, particularly for building vertical walls using an array of vias. The cavity was implemented in 0.18 µm CMOS technology and measurements were taken. The measurements showed that the resonant frequency and reflection coefficient were 96.9 GHz and -30.14 dB, respectively, in good agreement with the simulation results. The area of the proposed cavity was 0.0506 mm2 without measurement pads, which is only 2.4% and 8.9% when compared to the standard full-mode SIW cavity and the recently proposed 87 GHz.
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U2 - 10.23919/EuMC50147.2022.9784193
DO - 10.23919/EuMC50147.2022.9784193
M3 - Conference contribution
AN - SCOPUS:85132996045
T3 - 2021 51st European Microwave Conference, EuMC 2021
SP - 221
EP - 224
BT - 2021 51st European Microwave Conference, EuMC 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 51st European Microwave Conference, EuMC 2021
Y2 - 4 April 2022 through 6 April 2022
ER -