Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser

T. Shimogaki, T. Ofuji, M. Higashihata, H. Ikenoue, D. Nakamura, T. Asano, T. Okada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser'. Together they form a unique fingerprint.

Physics