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Densities and Surface Reaction Probabilities of Oxygen and Nitrogen Atoms during Sputter Deposition of ZnInON on ZnO
Koichi Matsushima, Tomoaki Ide, Keigo Takeda, Masaru Hori, Daisuke Yamashita, Hyunwoong Seo, Kazunori Koga, Masaharu Shiratani, Naho Itagaki
Research output: Contribution to journal › Article › peer-review
11
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(Scopus)