Control of the electron temperature by varying the resonance zone width in ECR plasma

N. Itagaki; H. Muta; N. Ishii; Y. Kawai

doi:10.1016/j.tsf.2003.12.014

Control of the electron temperature by varying the resonance zone width in ECR plasma

N. Itagaki, H. Muta, N. Ishii, Y. Kawai

Department of I&E Visionaries

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

The electron temperature (T_e) in an electron cyclotron resonance plasma is clarified to depend on the spatial profiles of the microwave-power absorption by both the electromagnetic-waves measurement and the simulation of microwave power absorption. It is found that T_e is controlled by varying the magnetic field configuration and/or the microwave frequency since the power absorption profile is influenced by the effective resonance width. In fact, T_e is observed to decrease with decreasing the magnetic field gradient at the resonance point for N₂, Ar and O₂/Ar plasma.

Original language	English
Pages (from-to)	59-63
Number of pages	5
Journal	Thin Solid Films
Volume	457
Issue number	1
DOIs	https://doi.org/10.1016/j.tsf.2003.12.014
Publication status	Published - Jun 1 2004
Event	16th Symposium on Plasma Science for Materials (SPSM-16) - Tokyo, Japan Duration: Jun 4 2003 → Jun 5 2003

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2003.12.014

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title = "Control of the electron temperature by varying the resonance zone width in ECR plasma",

abstract = "The electron temperature (Te) in an electron cyclotron resonance plasma is clarified to depend on the spatial profiles of the microwave-power absorption by both the electromagnetic-waves measurement and the simulation of microwave power absorption. It is found that Te is controlled by varying the magnetic field configuration and/or the microwave frequency since the power absorption profile is influenced by the effective resonance width. In fact, Te is observed to decrease with decreasing the magnetic field gradient at the resonance point for N2, Ar and O2/Ar plasma.",

author = "N. Itagaki and H. Muta and N. Ishii and Y. Kawai",

year = "2004",

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doi = "10.1016/j.tsf.2003.12.014",

language = "English",

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journal = "Thin Solid Films",

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T1 - Control of the electron temperature by varying the resonance zone width in ECR plasma

AU - Itagaki, N.

AU - Muta, H.

AU - Ishii, N.

AU - Kawai, Y.

PY - 2004/6/1

Y1 - 2004/6/1

N2 - The electron temperature (Te) in an electron cyclotron resonance plasma is clarified to depend on the spatial profiles of the microwave-power absorption by both the electromagnetic-waves measurement and the simulation of microwave power absorption. It is found that Te is controlled by varying the magnetic field configuration and/or the microwave frequency since the power absorption profile is influenced by the effective resonance width. In fact, Te is observed to decrease with decreasing the magnetic field gradient at the resonance point for N2, Ar and O2/Ar plasma.

AB - The electron temperature (Te) in an electron cyclotron resonance plasma is clarified to depend on the spatial profiles of the microwave-power absorption by both the electromagnetic-waves measurement and the simulation of microwave power absorption. It is found that Te is controlled by varying the magnetic field configuration and/or the microwave frequency since the power absorption profile is influenced by the effective resonance width. In fact, Te is observed to decrease with decreasing the magnetic field gradient at the resonance point for N2, Ar and O2/Ar plasma.

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U2 - 10.1016/j.tsf.2003.12.014

DO - 10.1016/j.tsf.2003.12.014

M3 - Conference article

AN - SCOPUS:2342624603

SN - 0040-6090

VL - 457

SP - 59

EP - 63

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1

T2 - 16th Symposium on Plasma Science for Materials (SPSM-16)

Y2 - 4 June 2003 through 5 June 2003

ER -

Control of the electron temperature by varying the resonance zone width in ECR plasma

Abstract

All Science Journal Classification (ASJC) codes

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