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Control of large area VHF plasma produced at high pressure
Tatsuyuki Nishimiya, Tsukasa Yamane, Yoshiaki Takeuchi, Yasuhiro Yamauchi, Hiromu Takatsuka, Hiroshi Muta, Kiichiro Uchino, Yoshinobu Kawai
Research output: Contribution to journal › Article › peer-review
8
Citations
(Scopus)