TY - JOUR
T1 - Construction of Response Function of TES X-ray Microcalorimeter for STEM-EDS
AU - Hayashi, Tasuku
AU - Muramatsu, Haruka
AU - Maehisa, Keisei
AU - Yamasaki, Noriko Y.
AU - Mitsuda, Kazuhisa
AU - Maehata, Keisuke
AU - Hara, Toru
N1 - Publisher Copyright:
© 2002-2011 IEEE.
PY - 2019/8
Y1 - 2019/8
N2 - A quantitative microanalysis of astromaterials (e.g., meteorite, returned samples from asteroids) is a key technology to understand the history of our solar system formation. To fulfill this, we developed an energy-dispersive X-ray spectroscopy (EDS) using a transition-edge sensor (TES) microcalorimeterarray on a scanning transmission electron microscope (STEM) for material analysis. To reduce the systematic errors of a spectral analysis, we investigated and constructed the response function of the STEM-EDS system, which consists of detection efficiency and a two-dimensional response matrix. The latter represents the pulse-height redistribution functions of the incident photons of different energies. Using the constructed response function, we demonstrated the quantitative determination of SiO2 film and confirmed that the number-density ratio of oxygen to silicon (=2.29+0.32-0.29) is consistent with the expected value of 2 within the statistical errors. We further study the systematic errors of the concentration determination with simulations. We analyze the simulated spectra of TES-EDS and SDD (silicon drift detector)-EDS without a priori knowledge about the continuum spectra and find that the systematic deviations of parameters from the model values are smaller than 1% for TES-EDS and larger than 10% for SDD-EDS.
AB - A quantitative microanalysis of astromaterials (e.g., meteorite, returned samples from asteroids) is a key technology to understand the history of our solar system formation. To fulfill this, we developed an energy-dispersive X-ray spectroscopy (EDS) using a transition-edge sensor (TES) microcalorimeterarray on a scanning transmission electron microscope (STEM) for material analysis. To reduce the systematic errors of a spectral analysis, we investigated and constructed the response function of the STEM-EDS system, which consists of detection efficiency and a two-dimensional response matrix. The latter represents the pulse-height redistribution functions of the incident photons of different energies. Using the constructed response function, we demonstrated the quantitative determination of SiO2 film and confirmed that the number-density ratio of oxygen to silicon (=2.29+0.32-0.29) is consistent with the expected value of 2 within the statistical errors. We further study the systematic errors of the concentration determination with simulations. We analyze the simulated spectra of TES-EDS and SDD (silicon drift detector)-EDS without a priori knowledge about the continuum spectra and find that the systematic deviations of parameters from the model values are smaller than 1% for TES-EDS and larger than 10% for SDD-EDS.
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U2 - 10.1109/TASC.2019.2902304
DO - 10.1109/TASC.2019.2902304
M3 - Article
AN - SCOPUS:85063969386
SN - 1051-8223
VL - 29
JO - IEEE Transactions on Applied Superconductivity
JF - IEEE Transactions on Applied Superconductivity
IS - 5
M1 - 8654629
ER -