Construction of Response Function of TES X-ray Microcalorimeter for STEM-EDS

Tasuku Hayashi, Haruka Muramatsu, Keisei Maehisa, Noriko Y. Yamasaki, Kazuhisa Mitsuda, Keisuke Maehata, Toru Hara

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


A quantitative microanalysis of astromaterials (e.g., meteorite, returned samples from asteroids) is a key technology to understand the history of our solar system formation. To fulfill this, we developed an energy-dispersive X-ray spectroscopy (EDS) using a transition-edge sensor (TES) microcalorimeterarray on a scanning transmission electron microscope (STEM) for material analysis. To reduce the systematic errors of a spectral analysis, we investigated and constructed the response function of the STEM-EDS system, which consists of detection efficiency and a two-dimensional response matrix. The latter represents the pulse-height redistribution functions of the incident photons of different energies. Using the constructed response function, we demonstrated the quantitative determination of SiO2 film and confirmed that the number-density ratio of oxygen to silicon (=2.29+0.32-0.29) is consistent with the expected value of 2 within the statistical errors. We further study the systematic errors of the concentration determination with simulations. We analyze the simulated spectra of TES-EDS and SDD (silicon drift detector)-EDS without a priori knowledge about the continuum spectra and find that the systematic deviations of parameters from the model values are smaller than 1% for TES-EDS and larger than 10% for SDD-EDS.

Original languageEnglish
Article number8654629
JournalIEEE Transactions on Applied Superconductivity
Issue number5
Publication statusPublished - Aug 2019

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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