Skip to main navigation Skip to search Skip to main content

Computational study on chemical mechanical polishing properties of perovskite oxide abrasive grain

  • Nobuki Ozawa
  • , Miho Nakamura
  • , Kentaro Kawaguchi
  • , Takeshi Ishikawa
  • , Yuji Higuchi
  • , Momoji Kubo

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original languageEnglish
Title of host publication5th World Tribology Congress, WTC 2013
PublisherPolitecnico di Torino (DIMEAS)
Pages1915-1916
Number of pages2
ISBN (Electronic)9781634393522
Publication statusPublished - 2014
Externally publishedYes
Event5th World Tribology Congress, WTC 2013 - Torino, Italy
Duration: Sept 8 2013 → Sept 13 2013

Publication series

Name5th World Tribology Congress, WTC 2013
Volume3

Other

Other5th World Tribology Congress, WTC 2013
Country/TerritoryItaly
CityTorino
Period9/8/13 → 9/13/13

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Mechanical Engineering

Cite this