Complementary exposure of 70 nm SoC devices in electron projection lithography

Hiroshi Yamashita, Isao Amemiya, Kunio Takeuchi, Hideki Masaoka, Kimitoshi Takahashi, Akihiro Ikeda, Yukinori Kuroki, Masaki Yamabe

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

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