Characterization of nanostructured multiphase Ti-Al-B-N thin films with extremely small grain size

Chemistry

• Grain Size 100%
• Liquid Film 87%
• Phase Composition 50%
• Amorphous Material 37%
• Nitrogen 37%
• Mixture 25%
• Partial Pressure 25%
• X-Ray Diffraction 25%
• High-Resolution Transmission Electron Microscopy 25%
• Grain Boundary 25%
• Procedure 12%
• Reaction Temperature 12%
• Structure 12%
• Microstructure 12%
• Thickness 12%
• Electron Energy Loss Spectroscopy 12%
• Number 12%
• Magnetron Sputtering 12%
• Phase Diagrams 12%
• Voltage 12%
• Phase Equilibria 12%
• Composite Material 12%
• Dimension 12%
• Physical Vapor Deposition 12%
• Auger Electron Spectroscopy 12%

Material Science

• Liquid Films 87%
• Amorphous Material 37%
• Mixture 25%
• Phase Composition 25%
• Grain Boundary 25%
• Cell 12%
• Thin Films 12%
• Characterization 12%
• Composite Material 12%
• Argon 12%
• Boron Nitride 12%
• Microstructure 12%