Characterization of DLC films by EELS and electron holography

Daisuke Shindo; Takayuki Musashi; Yoichi Ikematsu; Yasukazu Murakami; Norikazu Nakamura; Hiroshi Chiba

doi:10.1093/jmicro/dfh096

Characterization of DLC films by EELS and electron holography

Daisuke Shindo, Takayuki Musashi, Yoichi Ikematsu, Yasukazu Murakami, Norikazu Nakamura, Hiroshi Chiba

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

Thickness measurements of diamond-like carbon (DLC) films by electron energy-loss spectroscopy (EELS) and electron holography are discussed. In order to evaluate the thickness by EELS and electron holography, the mean free path for inelastic scattering and mean inner potential of DLC films were determined precisely, respectively. It is found that both the mean free path for inelastic electron scattering and the mean inner potential are sensitive to the preparation methods, namely the density of DLC films. The present work has demonstrated that thickness measurement by EELS is available to DLC films thicker than 20 nm, while electron holography can be applied to thinner films (∼5 nm). Furthermore, close relations are observed between the density of DLC films and the energy-loss spectra.

Original language	English
Pages (from-to)	11-17
Number of pages	7
Journal	Journal of Electron Microscopy
Volume	54
Issue number	1
DOIs	https://doi.org/10.1093/jmicro/dfh096
Publication status	Published - Jun 2 2005
Externally published	Yes

All Science Journal Classification (ASJC) codes

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abstract = "Thickness measurements of diamond-like carbon (DLC) films by electron energy-loss spectroscopy (EELS) and electron holography are discussed. In order to evaluate the thickness by EELS and electron holography, the mean free path for inelastic scattering and mean inner potential of DLC films were determined precisely, respectively. It is found that both the mean free path for inelastic electron scattering and the mean inner potential are sensitive to the preparation methods, namely the density of DLC films. The present work has demonstrated that thickness measurement by EELS is available to DLC films thicker than 20 nm, while electron holography can be applied to thinner films (∼5 nm). Furthermore, close relations are observed between the density of DLC films and the energy-loss spectra.",

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T1 - Characterization of DLC films by EELS and electron holography

AU - Shindo, Daisuke

AU - Musashi, Takayuki

AU - Ikematsu, Yoichi

AU - Murakami, Yasukazu

AU - Nakamura, Norikazu

AU - Chiba, Hiroshi

PY - 2005/6/2

Y1 - 2005/6/2

N2 - Thickness measurements of diamond-like carbon (DLC) films by electron energy-loss spectroscopy (EELS) and electron holography are discussed. In order to evaluate the thickness by EELS and electron holography, the mean free path for inelastic scattering and mean inner potential of DLC films were determined precisely, respectively. It is found that both the mean free path for inelastic electron scattering and the mean inner potential are sensitive to the preparation methods, namely the density of DLC films. The present work has demonstrated that thickness measurement by EELS is available to DLC films thicker than 20 nm, while electron holography can be applied to thinner films (∼5 nm). Furthermore, close relations are observed between the density of DLC films and the energy-loss spectra.

AB - Thickness measurements of diamond-like carbon (DLC) films by electron energy-loss spectroscopy (EELS) and electron holography are discussed. In order to evaluate the thickness by EELS and electron holography, the mean free path for inelastic scattering and mean inner potential of DLC films were determined precisely, respectively. It is found that both the mean free path for inelastic electron scattering and the mean inner potential are sensitive to the preparation methods, namely the density of DLC films. The present work has demonstrated that thickness measurement by EELS is available to DLC films thicker than 20 nm, while electron holography can be applied to thinner films (∼5 nm). Furthermore, close relations are observed between the density of DLC films and the energy-loss spectra.

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Characterization of DLC films by EELS and electron holography

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