Characterization of crystalline materials by electron tomography

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    Combination of transmission electron microscopy and computed tomography (TEM-CT) is a powerful technique to characterize three-dimensional nature of materials. In this paper, its principle and application are described in detail. In addition, as an example, TEM and TEM-CT was applied on TiN-Ag nanocomposite synthesized by dc arc-plasma method. Microstructures of TiN-Ag nanocomposite were carefully characterized by TEM, and nano-morphologies by TEM-CT. It was found that the surface of nanocrystalline TiN matrix was covered by finely dispersed Ag nanoparticles, and it was found that they were physically attached but not chemically bonded. From these experimental results, formation mechanisms are also predicted.

    Original languageEnglish
    Pages (from-to)253-255
    Number of pages3
    JournalJournal of the Vacuum Society of Japan
    Issue number4
    Publication statusPublished - 2011

    All Science Journal Classification (ASJC) codes

    • Materials Science(all)
    • Instrumentation
    • Surfaces and Interfaces
    • Spectroscopy


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