Fingerprint
Dive into the research topics of 'Characteristics in SiC-CMP using MnO2 slurry with strong oxidant under different atmospheric conditions'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Characteristics in SiC-CMP using MnO2 slurry with strong oxidant under different atmospheric conditions
Syuhei Kurokawa, Toshiro Doi, Osamu Ohnishi, Tsutomu Yamazaki, Zhe Tan, Tao Yin
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
10
Citations
(Scopus)