Characteristic of VHF plasma produced by balanced power feeding

K. Ogiwara, W. Chen, K. Uchino, Y. Kawai

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined using a two-dimensional hybrid model. The simulation results showed that the electron density peaks at a certain pressure inside the discharge electrodes and significantly decreases outside the electrodes for high gas pressure. In addition, the power absorption efficiency inside the electrodes was improved by increasing the gas pressure. On the other hand, the plasma was produced within the electrodes for low applied voltages.

Original languageEnglish
Article number012022
JournalJournal of Physics: Conference Series
Issue number1
Publication statusPublished - 2013
Event11th Asia Pacific Conference on Plasma Science and Technology, APCPST 2012 and 25th Symposium on Plasma Science for Materials, SPSM 2012 - Kyoto, Japan
Duration: Oct 2 2012Oct 5 2012

All Science Journal Classification (ASJC) codes

  • General Physics and Astronomy


Dive into the research topics of 'Characteristic of VHF plasma produced by balanced power feeding'. Together they form a unique fingerprint.

Cite this