TY - JOUR
T1 - Catalyst combustors with B-doped SiGe/Au thermopile for micro-power-generation
AU - Nishibori, Maiko
AU - Shin, Woosuck
AU - Tajima, Kazuki
AU - Houlet, Lionel F.
AU - Izu, Noriya
AU - Matsubara, Ichiro
AU - Murayama, Norimitsu
PY - 2006/11/10
Y1 - 2006/11/10
N2 - A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si0.8Ge0.2/Au and a Pt-loaded alumina ceramic thickfilm catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 μW using the micro-TE-generator with a fuel gas flow of 3 vol. % H2 in air, 1000 ccm, at RT.
AB - A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si0.8Ge0.2/Au and a Pt-loaded alumina ceramic thickfilm catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 μW using the micro-TE-generator with a fuel gas flow of 3 vol. % H2 in air, 1000 ccm, at RT.
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U2 - 10.1143/JJAP.45.L1130
DO - 10.1143/JJAP.45.L1130
M3 - Article
AN - SCOPUS:34548760892
SN - 0021-4922
VL - 45
SP - L1130-L1132
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 42-45
ER -