Carbon particle formation due to interaction between H2 plasma and carbon fiber composite wall

Kazunori Koga; Ryuji Uehara; Yasuhiro Kitaura; Masaharu Shiratani; Yukio Watanabe; Akio Komori

doi:10.1109/TPS.2004.828129

Carbon particle formation due to interaction between H₂ plasma and carbon fiber composite wall

Kazunori Koga, Ryuji Uehara, Yasuhiro Kitaura, Masaharu Shiratani, Yukio Watanabe, Akio Komori

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

Formation of carbon particles due to plasma surface interaction has been studied using an electron cyclotron resonance (ECR) plasma device. The interaction produces two sizes of groups: small spherical ones of 2-25 nm in size and large particles of irregular shape and above 100 nm in size. The latter are considered to be flakes peeled from carbon films deposited on the reactor wall. The total amount and average size of small particles tends to decrease with increasing the sheath voltage V_s between plasma and the carbon fiber composite (CFC) wall from 14 to 214 V. Optical emission intensities of CH and C as well as gas absorption rate to the CFC wall also decrease with increasing V_s. These results suggest that the carbon-containing species emitted from the CFC wall contribute to formation of small particles.

Original language	English
Pages (from-to)	405-409
Number of pages	5
Journal	IEEE Transactions on Plasma Science
Volume	32
Issue number	2 I
DOIs	https://doi.org/10.1109/TPS.2004.828129
Publication status	Published - Apr 2004

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Condensed Matter Physics

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10.1109/TPS.2004.828129

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title = "Carbon particle formation due to interaction between H2 plasma and carbon fiber composite wall",

abstract = "Formation of carbon particles due to plasma surface interaction has been studied using an electron cyclotron resonance (ECR) plasma device. The interaction produces two sizes of groups: small spherical ones of 2-25 nm in size and large particles of irregular shape and above 100 nm in size. The latter are considered to be flakes peeled from carbon films deposited on the reactor wall. The total amount and average size of small particles tends to decrease with increasing the sheath voltage Vs between plasma and the carbon fiber composite (CFC) wall from 14 to 214 V. Optical emission intensities of CH and C as well as gas absorption rate to the CFC wall also decrease with increasing Vs. These results suggest that the carbon-containing species emitted from the CFC wall contribute to formation of small particles.",

author = "Kazunori Koga and Ryuji Uehara and Yasuhiro Kitaura and Masaharu Shiratani and Yukio Watanabe and Akio Komori",

note = "Funding Information: Manuscript received August 30, 2003; revised October 15, 2003. This work was supported in part by the Japan Society for the Promotion of Science under a Grant-in-Aid for Experiments of Young Scientists (B) KAKENHI 14 780 385 and by the National Institute for Fusion Science.",

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doi = "10.1109/TPS.2004.828129",

language = "English",

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TY - JOUR

T1 - Carbon particle formation due to interaction between H2 plasma and carbon fiber composite wall

AU - Koga, Kazunori

AU - Uehara, Ryuji

AU - Kitaura, Yasuhiro

AU - Shiratani, Masaharu

AU - Watanabe, Yukio

AU - Komori, Akio

N1 - Funding Information: Manuscript received August 30, 2003; revised October 15, 2003. This work was supported in part by the Japan Society for the Promotion of Science under a Grant-in-Aid for Experiments of Young Scientists (B) KAKENHI 14 780 385 and by the National Institute for Fusion Science.

PY - 2004/4

Y1 - 2004/4

N2 - Formation of carbon particles due to plasma surface interaction has been studied using an electron cyclotron resonance (ECR) plasma device. The interaction produces two sizes of groups: small spherical ones of 2-25 nm in size and large particles of irregular shape and above 100 nm in size. The latter are considered to be flakes peeled from carbon films deposited on the reactor wall. The total amount and average size of small particles tends to decrease with increasing the sheath voltage Vs between plasma and the carbon fiber composite (CFC) wall from 14 to 214 V. Optical emission intensities of CH and C as well as gas absorption rate to the CFC wall also decrease with increasing Vs. These results suggest that the carbon-containing species emitted from the CFC wall contribute to formation of small particles.

AB - Formation of carbon particles due to plasma surface interaction has been studied using an electron cyclotron resonance (ECR) plasma device. The interaction produces two sizes of groups: small spherical ones of 2-25 nm in size and large particles of irregular shape and above 100 nm in size. The latter are considered to be flakes peeled from carbon films deposited on the reactor wall. The total amount and average size of small particles tends to decrease with increasing the sheath voltage Vs between plasma and the carbon fiber composite (CFC) wall from 14 to 214 V. Optical emission intensities of CH and C as well as gas absorption rate to the CFC wall also decrease with increasing Vs. These results suggest that the carbon-containing species emitted from the CFC wall contribute to formation of small particles.

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JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

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ER -

Carbon particle formation due to interaction between H₂ plasma and carbon fiber composite wall

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