C O2 sensor combining an MISiC capacitor and a binary carbonate

Hirofumi Inoue, Mike Andersson, Masayoshi Yuasa, Tetsuya Kida, Anita Lloyd Spetz, Kengo Shimanoe

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


A solid-state C O2 sensor device using a metal-insulator-silicon carbide (MISiC) capacitor combined with a Li2 C O3 -BaC O3 auxiliary layer was fabricated and tested for its basic sensing properties. The MISiC-based C O2 sensor attached with the carbonate showed typical capacitance-voltage (C-V) properties in air at 400°C, and the sensor device responded well to changes in C O2 concentration in air at 400°C. The sensor signals were directly proportional to the logarithm of C O2 concentration. The results suggested that an electrochemical reaction of C O2 occurred at the interface between the carbonate layer and the electrode, causing the applied voltage to shift in response to C O2.

Original languageEnglish
Pages (from-to)J4-J7
JournalElectrochemical and Solid-State Letters
Issue number1
Publication statusPublished - 2011

All Science Journal Classification (ASJC) codes

  • Chemical Engineering(all)
  • Materials Science(all)
  • Physical and Theoretical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering


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